To provide a method of producing particles of a metal oxide which has appropriate particle sizes and an appropriate particle size distribution and can form a thin film of the metal oxide having excellent electric characteristics, the particles of a metal oxide and a dispersed composition of the metal oxide particle, a thin film of metal oxide and a thin film device using the particles of a metal oxide.

A method of producing particles of a metal oxide includes a process of preparing a solution of a metal hydroxide by adding an alkali compound to a metal salt and/or an organic metal compound and a process of generating plasma in the solution of the metal hydroxide and reacting.