Title:
METHOD FOR PRODUCING POLISHING AGENT AND POLISHING AGENT
Document Type and Number:
Japanese Patent JP2006249129
Kind Code:
A
Abstract:
To provide a method for producing a polishing agent stable with time and to provide the polishing agent.
The method for producing the polishing agent comprises a step of adding an alkaline liquid to an aqueous solution containing a metal salt and depositing metal hydroxide particles. In the method, the metal hydroxide particles are deposited at pH4.0-7.5.
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Inventors:
AKIMOTO HIROTAKA
Application Number:
JP2005063728A
Publication Date:
September 21, 2006
Filing Date:
March 08, 2005
Export Citation:
Assignee:
HITACHI CHEMICAL CO LTD
International Classes:
C09K3/14; B24B37/00; C01F17/00; H01L21/304