Title:
METHOD FOR PRODUCING POLISHING COMPOSITION COMPRISING MODIFIED POLYVINYL ALCOHOL COMPOSITION, AND POLISHING COMPOSITION COMPRISING MODIFIED POLYVINYL ALCOHOL COMPOSITION
Document Type and Number:
Japanese Patent JP2023048391
Kind Code:
A
Abstract:
To provide a method for producing a polishing composition that has excellent filterability and enables reduction of the surface defects in a polishing object.SOLUTION: The present invention provides a method for producing a polishing composition comprising a modified polyvinyl alcohol composition, which comprises a modified polyvinyl alcohol or a derivative thereof, and water. The method includes a heat insulation step of holding the modified polyvinyl alcohol composition at a solution temperature of 30°C or higher and lower than 60°C. The heat insulation step is performed so that the parameter A becomes 2.0 or more.SELECTED DRAWING: None
Inventors:
ICHITSUBO DAIKI
TSUCHIYA KOSUKE
TSUCHIYA KOSUKE
Application Number:
JP2021157680A
Publication Date:
April 07, 2023
Filing Date:
September 28, 2021
Export Citation:
Assignee:
FUJIMI INC
International Classes:
C09K3/14; C08L29/14; H01L21/304
Attorney, Agent or Firm:
IBC Ichibancho Patent Attorney Corporation