Title:
METHOD FOR PRODUCING POLYMER POWDER, POLYMER POWDER AND RESIST COMPOSITION
Document Type and Number:
Japanese Patent JP2008056737
Kind Code:
A
Abstract:
To provide a method for producing a polymer giving a polymer containing little impurities such as metallic component and a polymer of former lot, etc., polymer powder having low impurity content and a resist composition.
The method for producing polymer powder comprises a step to produce the wet powder of a polymer by filtering a dispersion liquid containing a polymer dispersed in a dispersion medium with a filter 42 and a step to dry the obtained wet powder of polymer in the state deposited on the filter 42. The invention further provides polymer powder obtained by the production method and a resist composition obtained from the polymer powder produced by the production method.
Inventors:
Nakamura, Masa
Wakizaka, Yukiya
Wakizaka, Yukiya
Application Number:
JP2006000232253
Publication Date:
March 13, 2008
Filing Date:
August 29, 2006
Export Citation:
Assignee:
MITSUBISHI RAYON CO LTD
International Classes:
C08J3/12; C08F6/12; G03F7/039
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