Title:
METHOD OF PRODUCING SEMICONDUCTOR
Document Type and Number:
Japanese Patent JPS5414168
Kind Code:
A
Inventors:
IWAMOTO TAKUYA
Application Number:
JP8029977A
Publication Date:
February 02, 1979
Filing Date:
July 04, 1977
Export Citation:
Assignee:
KIYUUSHIYUU DENKI KK
International Classes:
H01L21/027; H01L21/302; (IPC1-7): H01L21/302