シリコン酸化膜の作製方法 - MITSUBISHI HEAVY INDUSTRIES,LTD.

Title:

シリコン酸化膜の作製方法

Document Type and Number:

Japanese Patent JP3592806

Kind Code:

B2

Inventors:

Hiroko Nakano
Tetsuhiro Horie
Hitoshi Sakamoto

Application Number:

JP21436295A

Publication Date:

November 24, 2004

Filing Date:

August 23, 1995

Export Citation:

Assignee:

MITSUBISHI HEAVY INDUSTRIES,LTD.

International Classes:

B01J19/12; C23C16/48; H01L21/205; H01L21/31; H01L21/316; H01L21/336; H01L29/78; (IPC1-7): H01L21/205

Domestic Patent References:

Attorney, Agent or Firm:

Ryoichi Hagiwara
Kimiyoshi Kato

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