Title:
テトラアルキルアンモニウム塩水溶液の製造方法
Document Type and Number:
Japanese Patent JP5717997
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for efficiently producing TAA (tetraalkylammonium) salt aqueous solution by causing TAA hydroxide-containing developing waste liquid to flow through a packed column packed with anion exchange resin to adsorb TAA ions in the resin, then bringing acid into contact with the resin to desorb the TAA ions adsorbed in the resin, thereby obtaining the TAA salt aqueous solution of high concentration without causing leakage of the TAA ions in the developing waste liquid.SOLUTION: A packed column line comprising a plurality of packed columns is formed, and the number of the columns n of the packed column line is set to a predetermined number or more. A structure is provided causing no leakage of the TAA ions from the most downstream packed column line, even if the TAA ions are adsorbed up to a target adsorption in the most upstream packed column line.
Inventors:
Naoyuki Umezu
Yoshifumi Yamashita
Hiroaki Hira
Yoshifumi Yamashita
Hiroaki Hira
Application Number:
JP2010174214A
Publication Date:
May 13, 2015
Filing Date:
August 03, 2010
Export Citation:
Assignee:
Tokuyama Corporation
International Classes:
C02F1/42; B01J47/02; B01J49/00; G03F7/32
Domestic Patent References:
| JP2004066102A | ||||
| JP2000288538A | ||||
| JP2009142764A | ||||
| JP2003302389A | ||||
| JP8084986A | ||||
| JP6142649A | ||||
| JP9225324A |
Foreign References:
| US5811012 | ||||
| US5439564 |
Attorney, Agent or Firm:
Noriyuki Yamamoto
Tetsuro Hoshino
Akihiko Yamashita
Kishimoto Tatsuto
Tetsuro Hoshino
Akihiko Yamashita
Kishimoto Tatsuto