Title:
テトラアルキルアンモニウム塩溶液の製造方法
Document Type and Number:
Japanese Patent JP5808221
Kind Code:
B2
Abstract:
[Problem] To efficiently remove a metal ion from solution containing a metal ion and tetraalkylammonium ion, such as resist development waste solution or the like. [Solution] A solution containing a metal ion and tetraalkylammonium ion and a cation-exchange resin are brought into contact, the ions are adsorbed to the resin, and then eluted by alkali metal salt solution. Not only the alkali metal ion but also tetraalkylammonium salt solution, of a lower concentration than this metal ion, can be recovered by monitoring the alkali metal ion concentration in the eluate and switching the recovery pathway before the alkali metal ion concentration rises suddenly. The recovered tetraalkylammonium salt can be made into tetraalkylammonium hydroxide by electrolysis. Sodium carbonate aqueous solution is most preferred as the alkali metal salt solution in terms of lack of interference during electrolysis, cost, and the like.
Inventors:
Atsushi Watanabe
Naoyuki Umezu
Yoshifumi Yamashita
Naoyuki Umezu
Yoshifumi Yamashita
Application Number:
JP2011237128A
Publication Date:
November 10, 2015
Filing Date:
October 28, 2011
Export Citation:
Assignee:
Tokuyama Corporation
International Classes:
C07C209/84; B01J49/00; C02F1/42; C07C211/63; G03F7/32
Domestic Patent References:
| JP2011012044A | ||||
| JP2004512315A | ||||
| JP2003340449A |
Foreign References:
| WO2011074495A1 |
Other References:
酒井 健二他,資源・素材2004(盛岡),社団法人 資源・素材学会,2004年,p.217-218