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Title:
METHOD FOR PRODUCTION OF ELECTROFORMED BODY
Document Type and Number:
Japanese Patent JP2012122119
Kind Code:
A
Abstract:

To provide an electroforming mold which is prepared using a photoresist made by exposure using ultraviolet light, has excellent fineness, less taper in a thickness direction and excellent perpendicularity, does not form an electroformed body to unnecessary portions, and can easily prepare that body having a desired shape.

A light-shielding pattern 7 comprising a transparent conductive film is formed on one surface of a glass substrate, the openings 12 are formed by exposure of a negative photoresist 8 from its rear face, and the electroformed body is formed on the opening. By repeating the processes after the process of forming the negative photoresist again, the electroformed bodies excellent in fineness and aspect ratio are produced.


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Inventors:
KISHI MATSUO
SATO MIE
NIWA TAKASHI
Application Number:
JP2010275955A
Publication Date:
June 28, 2012
Filing Date:
December 10, 2010
Export Citation:
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Assignee:
SEIKO INSTR INC
International Classes:
C25D1/10
Domestic Patent References:
JPS619592A1986-01-17
JPH1161477A1999-03-05
JPH1034870A1998-02-10
JPS55164831A1980-12-22
JPH11138827A1999-05-25
Attorney, Agent or Firm:
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura



 
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