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Title:
METHOD AND PROGRAM FOR ADJUSTING LIGHT SOURCE, AND EXPOSURE METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP2012089674
Kind Code:
A
Abstract:

To adjust the shape of an illumination light source easily to a required shape.

The method for adjusting a light source includes a step 102 for setting image modulation parameters Zj representing change in the actual shape for the target shape of an illumination light source, steps 113, 114 for determining a conversion matrix B of the image modulation parameters Zj and illumination system modulation parameters fBj with respect to a first illumination optical system where the shape of an illumination light source is adjusted based on the illumination system modulation parameters fBj, and a step 116 for determining a second set of values fBVj of an illumination system modulation parameters fBj corresponding to a first set of values ZVj of the image modulation parameters Zj by using the matrix B.


Inventors:
KITA HISANORI
Application Number:
JP2010234931A
Publication Date:
May 10, 2012
Filing Date:
October 19, 2010
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Satoshi Omori