Title:
トリメチルシランの精製方法
Document Type and Number:
Japanese Patent JP5861491
Kind Code:
B2
Inventors:
Takuya Teshima
Shigeo Shibayama
Yosuke Nakamura
Tomoyuki Hiraoka
Shigeo Shibayama
Yosuke Nakamura
Tomoyuki Hiraoka
Application Number:
JP2012034668A
Publication Date:
February 16, 2016
Filing Date:
February 21, 2012
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
C07F7/20; C07F7/08
Domestic Patent References:
JP2006117559A |
Attorney, Agent or Firm:
Yoshiyuki Nishi