To provide a treatment liquid reclaiming method capable of reclaiming a treatment liquid by efficiently removing metal components contained in the treatment liquid for treating a substrate at a low cost.
The treatment liquid reclaiming method comprises a treatment liquid reclaiming step of passing the treatment liquid into a movable vessel 1 filled with an adsorbent which adsorbs metal ions so as to separate and remove the metal components in the treatment liquid through their adsorption to the adsorbent at a treatment area for treating the substrate, a first delivery step of conveying the movable vessel 1, in which the treatment liquid has been passed, to an adsorbent reclaiming area which is an area isolated from the treatment area and in which the adsorbent is reclaimed, an adsorbent reclaiming step of passing an eluent into the movable vessel 1 delivered from the treatment area and eluting the metal adsorbed by the adsorbent to reclaim the adsorbent at the adsorbent reclaiming area, and a second delivery step of conveying the movable vessel 1 containing the reclaimed adsorbent back to the treatment area from the adsorbent reclaiming area. Here, the movable vessel 1 in which the adsorbent has been reclaimed is used in the treatment liquid reclaiming step.
TANAKA YUKIO
KASHIWAI TOSHIHIKO
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