Title:
METHOD FOR RECYCLING PERFLUORO COMPOUND
Document Type and Number:
Japanese Patent JP3650588
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for recycling a PFC which can separably recover useful components in a PFC mixture and use them again in a semiconductor manufacturing process, and which is free from a problem of releasing compounds associated in global warming to atmosphere and a need of disposal of reagents used for the reaction.
SOLUTION: A PFC mixture recovered from process exhaust gas of a semiconductor manufacturing process is, in a state of a mixture with an inert gas, (1) allowed to contact active carbon under a temperature condition of ≥500°C or (2) allowed to contact an alkaline earth metal compound under a temperature condititon of ≥100°C, and subsequently tetrafluoromethane and hexafluoroethane are separably recovered by rectification from the reaction mixture of the contact reaction (1) or (2). They can be recycled as PFC for the semiconductor manufacturing process.
Inventors:
Osami Nagano
Kozo Oya
Takeshi Manabe
Katsuto Edazawa
Akihiko Nitta
Hideki Ando
Kenichi Hachitaka
Masatoshi Goto
Kozo Oya
Takeshi Manabe
Katsuto Edazawa
Akihiko Nitta
Hideki Ando
Kenichi Hachitaka
Masatoshi Goto
Application Number:
JP2001129015A
Publication Date:
May 18, 2005
Filing Date:
April 26, 2001
Export Citation:
Assignee:
Institute for Global Environmental Technology
International Classes:
F25J3/02; B01J20/04; C07C17/38; C07C19/08; (IPC1-7): C07C17/38; C07C19/08; F25J3/02
Domestic Patent References:
| JP1028839A | ||||
| JP10249157A | ||||
| JP2002324785A |
Attorney, Agent or Firm:
Osamu Hatori