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Title:
METHOD FOR REGENERATING PLASMA TREATMENT CONTAINER, MEMBER INSIDE THE PLASMA TREATMENT CONTAINER, METHOD FOR MANUFACTURING THE MEMBER INSIDE THE PLASMA TREATMENT CONTAINER AND APPARATUS FOR PLASMA TREATMENT
Document Type and Number:
Japanese Patent JP2007332462
Kind Code:
A
Abstract:

To provide a method for regenerating a plasma treatment container to a nearly new state when the surface of the container is degraded through its use in the plasma environment.

When a sprayed coating comprising either alumina, a rare earth oxide, polyimide or polybenzimidazole that covers the surface of a substrate of member inside a plasma treatment container becomes degraded through its use in a plasma environment, materials same as that composing the sprayed coating is resprayed over the degraded sprayed coating.

COPYRIGHT: (C)2008,JPO&INPIT


Inventors:
IMAFUKU KOSUKE
Application Number:
JP2007190921A
Publication Date:
December 27, 2007
Filing Date:
July 23, 2007
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
C23C4/04; C23C4/02; C23C16/44; H01L21/3065
Domestic Patent References:
JPH08339895A1996-12-24
JPH06232243A1994-08-19
JP2000114189A2000-04-21
JPH09228071A1997-09-02
JPH0598412A1993-04-20
JPH03264705A1991-11-26
JP2001164354A2001-06-19
JPH01120328U1989-08-15
JPH07176524A1995-07-14
JPH02301548A1990-12-13
JPH11323526A1999-11-26
JPH11269639A1999-10-05
JPH08284604A1996-10-29
JP2000234161A2000-08-29
JPH01188657A1989-07-27
JPH11209864A1999-08-03
JPH10158810A1998-06-16
JPH01268853A1989-10-26
JPH104083A1998-01-06
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara



 
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