METHOD FOR REMOVING DUST IN CLEAN ROOM

Title:

METHOD FOR REMOVING DUST IN CLEAN ROOM

Document Type and Number:

Japanese Patent JP3141679

Kind Code:

B2

Abstract:

PURPOSE: To use the wall face or floor face as an auxiliary means to remove dust by positively utilizing the dust adsorptivity of a chargeable paint.
CONSTITUTION: A chargeable paint consisting of a fluororesin paint is applied on the wall face 2 and floor face 3 as the interior finish of a clean room 1, and the surfaces of the wall face 2 and floor face 3 are covered with a chargeable paint layer 4.

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Inventors:

Miki Aoyama
Nagao Hori
Koichiro Takahashi

Application Number:

JP7705394A

Publication Date:

March 05, 2001

Filing Date:

April 15, 1994

Export Citation:

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Assignee:

Obayashi Corporation

International Classes:

E04H5/02; B01J20/28; B03C3/02; B03C3/28; B03C3/60; B08B17/02; H01L21/02; (IPC1-7): E04H5/02; B03C3/28; B08B17/02; H01L21/02

Domestic Patent References:

JP61218613A
JP63275681A
JP62227967A
JP62179541U

Attorney, Agent or Firm:

Kensuke Isshiki (2 outside)

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