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Title:
METHOD FOR REMOVING ILL EFFECT OF MINERAL OIL
Document Type and Number:
Japanese Patent JPH04351697
Kind Code:
A
Abstract:

PURPOSE: To release a harmful adsorptive gas contained in a used oil of an oil rotating pump used as an evacuation apparatus in the vapor phase growth method for an organic metal and remove its ill effects by subjecting it to a specified treatment.

CONSTITUTION: The title method comprises holding a used oil of an oil rotating pump used as an evaporation apparatus in the vapor phase growth method for an organic metal at a pressure of 0.5Torr or less, holding its temperature at room temperature or above and passing an inert gas such as nitrogen through the oil.


Inventors:
Sakaguchi, Yasuyuki
Okuyama, Mineo
Hosokawa, Yasuo
Mada, Hisao
Application Number:
JP1991000152345
Publication Date:
December 07, 1992
Filing Date:
May 28, 1991
Export Citation:
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Assignee:
SHOWA DENKO KK
International Classes:
C10M175/02; C23C16/44; C30B29/54; H01L21/205; (IPC1-7): C10M175/02; C23C16/44; C30B29/54; H01L21/205



 
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