METHOD OF REMOVING METAL CONTAINED IN ALICYCLIC HYDROCARBON POLYMER, AND RADIATION-SENSITIVE COMPOSITION

Japanese Patent JP2003342319

A

To provide a purification process by which a metal contained in alicyclic hydrocarbon polymers as an impurity is removed and to provide a radiation-sensitive resin composition of a high performance photoresist which is composed of the purified polymer.

1. The method of removing a metal contained in the alicyclic hydrocarbon polymer comprises the following processes: a process of coagulating the alicyclic hydrocarbon polymer by mixing an acid-added organic solvent solution of the polymer with its poor solvent, and a process of dissolving the coagulated polymer into a water-insoluble organic solvent, followed by bringing the solution into contact with an acidic hot water solution, extracting the metal contained therein. 2. The radiation-sensitive composition contains the alicyclic hydrocarbon polymer purified by the above-mentioned processes to remove the contained metal, and a radiation-sensitive acid generator.

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SUWA YOSHI
NAKASE YOSHIHISA
IWAZAWA HARUO
SANO KIMIYASU

JP2002153421A

December 03, 2003

May 28, 2002

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JSR CORP

G03F7/039; C08F6/08; C08F32/04; C08G67/02; G03F7/26; G03F7/38; H01L21/027; (IPC1-7): C08F6/08; C08F32/04; C08G67/02; G03F7/039; G03F7/26; G03F7/38; H01L21/027

Shuji Iwamiya

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