Title:
METHOD FOR REMOVING ORGANIC COATING FILM, AND REMOVING DEVICE
Document Type and Number:
Japanese Patent JP3914842
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a means to efficiently and economically remove an organic coating film on a substrate such as a resist film in a short period of time by using a treating liquid which is safe even at high temperature and can be recycled and reused.
SOLUTION: (1) The method for removing an organic coating film on the surface of a substrate is carried out by bringing a treating liquid comprising a liquid ethylene carbonate or propylene carbonate or a liquid mixture of these, particularly with ozone dissolved in the treating liquid, into contact with the substrate having the organic coating film. (2) The device for removing an organic coating film on a substrate surface is equipped with: (A) a treating liquid introducing means to transfer the treating liquid to the treating zone; (B) a coating film contact means to bring the treating liquid into contact with the surface of the substrate having the coating film in the treating zone; (C) a liquid circulating means to circulate the discharged liquid from the treating zone by way of one or more of temporary storage means to return to the treating zone; and (D) an ozone dissolving means to bring an ozone-containing gas into contact with the treating liquid in the treating zone or in the temporary storage means.
Inventors:
Muraoka Hisashi
Muraoka Rieko
Asuka Sato
Mitsuru Endo
Muraoka Rieko
Asuka Sato
Mitsuru Endo
Application Number:
JP2002229394A
Publication Date:
May 16, 2007
Filing Date:
August 07, 2002
Export Citation:
Assignee:
UMS Co., Ltd.
Nomura Micro Science Co., Ltd.
Nomura Micro Science Co., Ltd.
International Classes:
G02F1/13; G03F7/42; B08B3/02; B08B3/04; C09D9/00; C11D7/26; C11D11/00; G02F1/1333; H01L21/027; H01L21/304; H01L21/306; H01L21/3063; H01L21/3065; (IPC1-7): G03F7/42; G02F1/13; G02F1/1333; H01L21/027; H01L21/304; H01L21/306; H01L21/3065
Domestic Patent References:
| JP7194806A | ||||
| JP6128249A | ||||
| JP2001194806A | ||||
| JP2003529675A | ||||
| JP6224168A | ||||
| JP11174692A |
Foreign References:
| WO2001074985A1 |
Attorney, Agent or Firm:
Shuji Iwamiya
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