Title:
METHOD OF REMOVING ORGANIC SUBSTANCE AND DEVICE
Document Type and Number:
Japanese Patent JP3804377
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To readily remove an organic substance at a desired position on a processed member, without forming a mask.
SOLUTION: In an organic substance removing device 10, an ejection head 12 is disposed on an XY table 14 and is shifted along the surface of the processed member. The ejection head 12 is formed with the same configuration as a printer head of an inkjet printer. A plurality of liquid outlets 16 for delivering treatment liquid, such as ozone water, is disposed thereon linearly or in a staggered manner. The ejecting head 12 and the XY table 14 are controlled by a controller 40 to deliver and apply treatment liquid to a desired position on the processed member. Thus, an organic substance in the section is decomposed and removed.
Inventors:
Yoshiaki Mori
Application Number:
JP35795599A
Publication Date:
August 02, 2006
Filing Date:
December 16, 1999
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B08B3/08; H01L21/306; (IPC1-7): H01L21/306; B08B3/08
Domestic Patent References:
| JP10215051A | ||||
| JP4302144A | ||||
| JP5152203A | ||||
| JP10209132A | ||||
| JP2001156049A |
Foreign References:
| WO1998037575A1 |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Osamu Suzawa