PURPOSE: To prevent a film formed by coating a substrate from being stained with a solvent or the like for removing the unnecessary matter stuck to the circumference of the substrate at the time of removing it by covering the surface of the substrate with a layer of a liquid not impairing the film to protect it at the time of removing the stuck matter.

CONSTITUTION: The solvent ejected out of a nozzle 22 strikes on the reverse side 10b of the substrate 10, depicts a circle 24 toward the circumference of the substrate 10, as the substrate 10 rotates, dissolves off the stuck matter 14, and disperses in the tangential direction. At that time, the protective liquid is allowed to continuously flow out of a nozzle 21 set above the substrate 10 from the start of ejection of the solvent out of the nozzle 22 to the completion of removal of the stuck matter, thus permitting the protective liquid not impairing the film to cover the surface of the film in a layer and to effectively prevent the film formed on the substrate from being stained with the solvent for removing the stuck material or the removed stuck matter.