Title:
吸引保持手段の被加工物離脱方法
Document Type and Number:
Japanese Patent JP5858837
Kind Code:
B2
Inventors:
Fukuoka Takeomi
Ryo Mizushima
Ryo Mizushima
Application Number:
JP2012068341A
Publication Date:
February 10, 2016
Filing Date:
March 23, 2012
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23Q7/04; B24B41/06; H01L21/301; H01L21/677
Domestic Patent References:
| JP2003117870A | ||||
| JP200990446A | ||||
| JP2010153585A | ||||
| JP200976720A | ||||
| JP2009202330A |
Foreign References:
| US20100267317 | ||||
| US20060135047 |
Attorney, Agent or Firm:
Hiroaki Sakai