Title:
METHOD FOR REPRODUCING METALLIC CVD PRECURSOR
Document Type and Number:
Japanese Patent JP3373826
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for recovering ligands and/or metallic salt from a metal-ligand complex by-product produced at the time of settling a metal from a metal-ligand complex precursor or a material contg. the metal.
SOLUTION: This method for recovering 1,1,1,5,5,5-hexafluoro-2,4-pentanedione ligands from a copper-ligand complex by-product, in a process flow, a copper- ligand complex by-product such as Cu+2 (1,1,1,5,5,5-hexafluoro-2,4- pentanedionate-1)2 is fed, the copper-ligand complex by-product is cooled, condensed and separated from the stage flow, and the copper-ligand complex by- product is brought into contact with a protonating agent such as sulfuric acid, hydrochloric acid, hydroiodic acid, hydrobromic acid, acetic acid trifluoride, methanesulfonic acid trifluoride, an acid ion-exchange resin, hydrogen sulfide, water vapor and the mixture thereof to recover 1,1,1,5,5,5-hexafluoro-2,4,- pentanedione.
Inventors:
John Anthony Thomas Norman
John Cameron Gordon
Yoshihide Senzaki
John Cameron Gordon
Yoshihide Senzaki
Application Number:
JP34167899A
Publication Date:
February 04, 2003
Filing Date:
December 01, 1999
Export Citation:
Assignee:
AIR PRODUCTS AND CHEMICALS INCORPORATED
International Classes:
C07C45/85; C07C49/167; C07C49/92; C07F1/08; C07F7/08; C23C16/00; C23C16/44; H01L21/285; B01J19/00; (IPC1-7): C23C16/44; B01J19/00
Domestic Patent References:
| JP5722A | ||||
| JP7500318A |
Other References:
【文献】国際公開99/32686(WO,A1)
Attorney, Agent or Firm:
Takashi Ishida (4 others)