To quickly change a temperature of a variable-temperature element in a low temperature range.
A heat exchanger 2 connected to an opening of an orifice 3 is communicated to a surface to be heated and cooled, and is placed in a jacket 4 defining a reserver for storing the fluid kept into contact with the surface, they are respectively independently connected to the heat exchanger 2, two gas sources 5, 6 are mounted in a state that one of them supplies a first gas being expanded when it passes through the orifice 3, and liquefied, and the other supplies a second gas having a reversal temperature lower than a temperature obtained by the liquefaction of the first gas, the waste gas flowing out from the jacket 4 is allowed to flow into the heat exchanger 2 to heat or cool the flowing gas, and the first and second gases are allowed to alternately flow into the heat exchanger 2 and the orifice 3 to cool or heat the surface.
Masatoshi Iwade
Masaya Nishiyama