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Title:
METHOD FOR SETTING IONIC CONCENTRATION OF ELECTROLYTE, AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP2006328536
Kind Code:
A
Abstract:

To provide a method for setting and maintaining the concentration of deposition metal ions present in an electrolyte for depositing metal on a substrate without being influenced by the corresponding cation concentration, and to provide a device therefor.

Since an electrolytic flow 1 and an exchange liquid flow 2 contact each other via a cation exchange membrane or a microporous membrane 3, deposition metal ions (Ni2+) present in the exchange liquid flow move to the electrolytic flow 2 via the cation exchange membrane or microporous membrane 3 by Donnan dialysis. In this way, the concentration of the deposition metal ions in the electrolytic flow 1 can be set without changing the cation concentration or cation constitution in the electrolyte.


Inventors:
KONIG AXEL
MOEBIUS ANDREAS
STARK FRANZ-JOSEF
Application Number:
JP2006145310A
Publication Date:
December 07, 2006
Filing Date:
May 25, 2006
Export Citation:
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Assignee:
ENTHONE
International Classes:
C23C18/16; B01D61/28; B01D61/58; B01D63/02; B01D63/08; C23C18/31
Attorney, Agent or Firm:
Yasuo Itaya



 
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