Title:
METHOD FOR SHAPING CHUCK TABLE, AND METHOD FOR GRINDING WORKPIECE
Document Type and Number:
Japanese Patent JP2023076853
Kind Code:
A
Abstract:
To provide a method for shaping a chuck table which can appropriately shape the whole of a holding surface compared to a conventional method.SOLUTION: A method for shaping a chuck table includes: a first shaping step of relatively moving a chuck table and a grinding unit so as to make the chuck table and the grinding unit approach each other in a Z-axis direction, grinding a holding surface side of the chuck table, and thereby shaping a central side of the holding surface; a movement stop step of stopping relative movement of the chuck table and the grinding unit in the Z-axis direction; and a second shaping step of relatively moving the chuck table and the grinding unit in an X-axis direction so as to separate the center of the holding surface and the center of a wheel for shaping from each other while relatively moving the chuck table and the grinding unit so as to separating the chuck table and the grind unit from each other in the Z-axis direction simultaneously with or after the movement stop step, grinding the holding surface side of the chuck table, and thereby shaping the outer edge side of the holding surface.SELECTED DRAWING: Figure 6
Inventors:
SUZUKI KEIICHI
Application Number:
JP2021189827A
Publication Date:
June 05, 2023
Filing Date:
November 24, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B7/04; B24B41/06; H01L21/304
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
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