Title:
METHOD OF SLIGHTLY POLISHING THIN CERAMIC SHEET
Document Type and Number:
Japanese Patent JPS5590261
Kind Code:
A
Abstract:
PURPOSE: To slightly polish a thin ceramic sheet with high yield, by using ultrasonic vibration together with a solution which contains polishing grains.
CONSTITUTION: A thin ceramic sheet 2, which is rougly polished by a lapping machine beforehand, is put in a container 2 which contains a solution including polishing grains. A reticulate dipped lid 4 is set in the container 2. The container is put in an ultrasonic vibration generator 5 to cause the container to undergo ultrasonic vibration. As a result, friction is caused between the thin ceramic sheet 3 and the polishing grains in the solution 1 to slightly polish the surface of the sheet by the grains.
Inventors:
KOMATSU YASUMASA
NONAKA KAZUSHI
OOSHIMA NOBUMASA
NONAKA KAZUSHI
OOSHIMA NOBUMASA
Application Number:
JP16575178A
Publication Date:
July 08, 1980
Filing Date:
December 27, 1978
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
B24B31/10; (IPC1-7): B24B31/10