Title:
METHOD OF SUPPLYING GASIFIED GAS
Document Type and Number:
Japanese Patent JP3149514
Kind Code:
B2
Abstract:
PURPOSE: To prevent gasified gas from reliquefying, concerning the supply method for gasified gas (gas being made by gasifying liquid gas).
CONSTITUTION: This method is a gasified gas supply method for supplying a device with gasified gas from a liquefied gas source 1 through a supply pipe 2, and an outside pipe 3 is provided apart around the supply pipe 2, and this is constituted so as to prevent gasified gas from reliquefying by providing an outside pipe 3 apart around the supply pipe 2 and letting heated gas into space. Moreover this is constituted so as to let gas heated gas flow in the opposite direction to the direction of gasified gas flowing in space, and detect the temperature of the space on the side of a liquefied gas source 1, and control the power of a gas heating source 4 so that it may be preset temperature.
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Inventors:
Nobuo Fujie
Mitsuo Igarashi
Koichi Kawai
Sadao Aoki
Mitsuo Igarashi
Koichi Kawai
Sadao Aoki
Application Number:
JP8121792A
Publication Date:
March 26, 2001
Filing Date:
April 03, 1992
Export Citation:
Assignee:
富士通株式会社
International Classes:
C23C14/56; F16L53/32; C30B25/14; H01L21/02; H01L21/205; H01L21/285; H01L21/302; H01L21/3065; H01L21/31; (IPC1-7): H01L21/3065; C23C14/56; C30B25/14; F16L53/00; H01L21/02
Domestic Patent References:
| JP61269309A | ||||
| JP2184031A | ||||
| JP6178393A |
Attorney, Agent or Firm:
Teiichi Igeta