Title:
圧力センサ用ダイアフラムの撓みを抑制する方法および圧力センサ用ダイアフラム
Document Type and Number:
Japanese Patent JP7417698
Kind Code:
B2
Abstract:
Provided is a pressure sensor, which realizes a film stress reduction structure with reasonable machining dimensions, so that zero shift caused by a deposition film of a sensor diaphragm is as small as possible. The present invention is provided with a sensor diaphragm (41) constituting a part of a wall of a pressure chamber (44) into which a fluid to be measured is introduced. One surface of the sensor diaphragm (41) coming in contact with the fluid to be measured includes a plurality of inclined surfaces (53, 54) inclined with respect to the thickness direction of the sensor diaphragm (41) and also directing toward the inside of the pressure chamber (44).
Inventors:
Takuya Ishihara
Masaru Soeda
Masashi Sekine
Masaru Soeda
Masashi Sekine
Application Number:
JP2022194073A
Publication Date:
January 18, 2024
Filing Date:
December 05, 2022
Export Citation:
Assignee:
Azbil Corporation
International Classes:
G01L9/12; G01L7/08; G01L19/06
Domestic Patent References:
| JP2016118494A | ||||
| JP2016180651A | ||||
| JP2009524024A |
Foreign References:
| US20180024021 |
Attorney, Agent or Firm:
Shigeki Yamakawa
Masaki Yamakawa
Masaki Yamakawa