METHOD FOR SURFACE TREATMENT BY DISCHARGE LAMP

Japanese Patent JPS61163633

A

PURPOSE:To shorten the treating time by utilizing ultraviolet rays effectively by irradiating the surface of an object with the light of a discharge lamp having the predetermined electrical input and spectral output to cause a photochemical reaction. CONSTITUTION:A treated object 8 is supported by a holder 2 in a decomposition chamber 1 and a gas including a treating gas such as O2 and N2O is supplied from an inlet 11. The upper portion of the chamber 1 is divided by a crystal glass 3 and a lamp 4 is arranged in which a high-pressure mercury lamp 5 having an electrical input of 7W/cm or above per ark length is placed. Behind the lamp 5, a mirror 6 is arranged to irradiate the object 8 with the light from the discharge lamp 5. The spectral output of the discharge lamp 5 is determined as follows: assuming that the output of 160-1,000nm is 100%, the output under 190nm is about 0.1% or under, that of 190-200nm is 0.1-0.5%. The used high- pressure mercury lamp of 7kW satisfies those conditions enough and a photochemical reaction is caused by the intensive ultraviolet rays of 300nm or under thereby effecting decomposition and purification of organic contaminants in a short time.

SUGIOKA SHINJI

JP395885A

July 24, 1986

January 16, 1985

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USHIO ELECTRIC INC

C23C16/48; H01L21/205; H01L21/26; H01L21/263; H01L21/31; (IPC1-7): C23C16/48; H01L21/263; H01L21/31; H01L21/324

Torasuke Tahara

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