PURPOSE: To mass-produce B1 type tantalum nitride near to a stoichiometric compound in a high conversion rate by propagating a shock wave to a starting substance containing hexagonal tantalum nitride to compress the same.
CONSTITUTION: The shock wave due to a flight plate 4 accelerated at high speed by the combustion gas of powder is propagated to a holding container 1 receiving a starting substance 3 composed of a powder containing hexagonal tantalum nitride, the compacted powder thereof or the sintered body thereof to convert hexagonal tantalum nitride in the starting substance 3 to B1 type tantalum nitride. Since the yield of B1 type of tantalum nitride is high and mass production is possible and no denitrification is generated in this method, B1 type tantalum nitride from a stoichiometric composition to a non- stoichiometric composition can be easily obtained by controlling the nitrogen content in the starting substance.
NISHIDA MINORU
YAMAYA SUSUMU
YAMAZAKI HISASHI
