Title:
METHOD FOR SYNTHESIZING DIAMOND MEMBRANE
Document Type and Number:
Japanese Patent JPH01164796
Kind Code:
A
Abstract:
PURPOSE:To stably synthesize the title homogenous membrane with high efficiency by using two plasma torches and making discharge gas high in discharge voltage to plasma with one torch and making gaseous reactive hydrocarbon low in discharge voltage to plasma with the other torch and allowing both plasma jets to collide with each other on a substrate. CONSTITUTION:While feeding discharge gas (e.g., H2) high in discharge voltage between a cathode 14 and an anode 16, voltage is impressed with a DC electric source 18 to generate arc discharge and arc plasma is generated and also the above-mentioned gas fed to the arc plasma generating part of a plasma torch 12 is heated and activated and a plasma jet 20 is jetted. On the other hand, similarly gaseous reactive hydrocarbon (e.g., CH4) low in discharge voltage is made to plasma between a cathode 15 and an anode 17 and also the above- mentioned gas (e.g., CH4) fed to the arc plasma generating part of a plasma torch 13 is heated and activated and a plasma jet 21 is jetted. Then these plasma jets 20, 21 are allowed to collide on a base plate 23 such as silicon placed on a water-cooled substrate holder 22 and the title membrane is synthesized by quenching them.
Inventors:
KAWARADA MOTONOBU
KURIHARA KAZUAKI
SASAKI KENICHI
ETSUNO NAGAAKI
KURIHARA KAZUAKI
SASAKI KENICHI
ETSUNO NAGAAKI
Application Number:
JP32014287A
Publication Date:
June 28, 1989
Filing Date:
December 19, 1987
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/205; C30B29/04; (IPC1-7): C30B29/04; H01L21/205
Domestic Patent References:
| JPS638294A | 1988-01-14 |
Attorney, Agent or Firm:
Aoki Akira (3 outside)
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