Title:
METHOD FOR SYNTHESIZING POLYCRYSTALLINE SEMICONDUCTOR COMPOUND
Document Type and Number:
Japanese Patent JP3888142
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for synthesizing a III-V group polycrystalline semiconductor compound by which a reusable life of a boat for synthesis can be improved.
SOLUTION: The method for synthesizing the III-V group polycrystalline semiconductor compound is said that the boat 4 with a slit 51 packed with a III group raw material is placed at one end side in a sealed tube and meanwhile a V group raw material is placed at another end side and then the sealed tube is heated in this condition. The boat 4 is comprised of belt-like notched parts 52 lengthened from the open peripheries at the both open ends of the cylindrical wall of the boat body 50 to the slit ends direction and cover parts 60 screwed at the both open ends of the boat body holding the heat-resistant film disks 70 with projection parts 71 fitted to the belt-like notched parts.
Inventors:
Sugano Houji
Application Number:
JP2001355587A
Publication Date:
February 28, 2007
Filing Date:
November 21, 2001
Export Citation:
Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
C01B25/08; H01L21/205; (IPC1-7): C01B25/08; H01L21/205
Domestic Patent References:
| JP6275532A | ||||
| JP2000119011A | ||||
| JP2001335307A |
Attorney, Agent or Firm:
Akira Ueda
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