To dry a thin device sheet uniformly without causing any damage.

The system for drying a device sheet comprises ducts 2 and 3 conducting N2 gas for drying, and clean room sheets 71 and 72 disposed closely to each other on the upstream side and downstream side of N2 gas while traversing the ducts 2 and 3 and clamping a device sheet 9. The ducts 2 and 3 are divided on the upstream side and downstream side, a clean room sheet 71 is laid between rotary shafts 61 and 62 disposed on the side of the upstream side duct 2 to traverse the opening thereof and a clean room sheet 72 is laid between rotary shafts 63 and 64 disposed on the side of the downstream side duct 3 to traverse the opening thereof. When both ducts 2 and 3 are disposed while facing the openings (22, 32) closely each other, the device sheet 9 is clamped by the clean room sheets 71 and 72.