Title:
METHOD AND SYSTEM FOR IMAGING MULTI-PILLAR SAMPLE
Document Type and Number:
Japanese Patent JP2022159166
Kind Code:
A
Abstract:
To provide a method capable of adjusting a plurality of pillar samples, performing tomographic imaging, and reconstructing a 3D image in a short time.SOLUTION: A method includes: providing a multi-pillar sample including at least a first pillar and a second pillar parallel with the first pillar; directing a charged particle beam to the first pillar; imaging the first pillar at a plurality of rotational positions by rotating the multi-pillar sample about a first pillar axis of the first pillar; directing the charged particle beam to the second pillar; and imaging the second pillar at a plurality of rotational positions by rotating the multi-pillar sample about a second pillar axis of the second pillar.SELECTED DRAWING: Figure 1A
Inventors:
ANDREAS VOGT
MAGDA ZAORALOVA
TROND K VARSLOT
MAGDA ZAORALOVA
TROND K VARSLOT
Application Number:
JP2022056635A
Publication Date:
October 17, 2022
Filing Date:
March 30, 2022
Export Citation:
Assignee:
FEI CO
International Classes:
H01J37/22; G01N1/28; H01J37/20; H01J37/317
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Osamu Miyazaki
Tadahiko Ito
Osamu Miyazaki
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