Method and system for thin film deposition - Toray Engineering Co., Ltd.

Title:

Method and system for thin film deposition

Document Type and Number:

Japanese Patent JP6006614

Kind Code:

B2

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Inventors:

Miyashita Katsuyoshi
Toshiyuki Jinda

Application Number:

JP2012242474A

Publication Date:

October 12, 2016

Filing Date:

November 02, 2012

Export Citation:

Assignee:

Toray Engineering Co., Ltd.

International Classes:

C23C16/44

Domestic Patent References:

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