Title:
METHOD FOR IMPLEMENTING TOPOGRAPHY, AND TOPOGRAPHY MEASURING INSTRUMENT
Document Type and Number:
Japanese Patent JP2023155907
Kind Code:
A
Abstract:
To provide a method for implementing a topography measurement presenting better results than a conventional art.SOLUTION: A topographic measurement method includes provision of a sample including first surface provided with plurality of salient patterns (2). A first surface of a sample (1) is illuminated by structured light that defines several repetitive patterns. The structured light is emitted at a first angle (α) with respect to the first surface. A first image of the first surface of the sample (1) illuminated by the structured light is acquired. The first image is acquired at a second angle (β) with respect to the first surface. A second image of the illuminated sample (1) is acquired. The second image differs in a value of an exposure time from the first image. The first image is compared with the second image so as to determine existence of at least one artifact on the first image. A reference image is formed from the first image and second image. The reference image does not have any artifact. A quantity representing the first surface is calculated from the reference image.SELECTED DRAWING: Figure 1
Inventors:
REGIS BRAISAZ
PIERRE VERNHES
PIERRE VERNHES
Application Number:
JP2023063658A
Publication Date:
October 23, 2023
Filing Date:
April 10, 2023
Export Citation:
Assignee:
INSIDIX
International Classes:
G01B11/25
Attorney, Agent or Firm:
Manabu Miyajima
Takeshi Sekine
Nobuto Ishihara
Takeshi Sekine
Nobuto Ishihara