PURPOSE: To prevent solvent attached to a substance to be washed from being taken out to the outside by letting a substance to be washed pass a cooling coil while repeating elevation and stoppage of the substance to be washed intermittently after finish of vapor washing so as to take it out of a washer.

CONSTITUTION: There is a washer 6 which shifts a substance to be washed alternately between a vapor washing zone 7 arising from a vapor bath 1 and a liquid bath 2 so as to automatically wash it, wherein a cooling coil 5 to prevent the diffusion of vapor in the washing zone 7 is installed above the vapor washing zone 7. After a chain of vapor washing is completed, a substance 3 to be washed standing in the washing zone 7 is driven for X seconds by a cooling coil 5, that is, it rises and stops at a cooling coil part 7 for Y seconds. This cycle is repeated several times and the substance 3 to be washed moves to a dry zone 4. Hereby, solvent attached to the substance 3 to be washed ceases to be taken out to the outside, and the amounts of solvent to be used can be reduced.