To provide a device and a method to treat the waste gas generating from a cleaning liquid essentially comprising inorganic acids in a cleaning tower so that the initial cost and the running cost for the equipment can be decreased.
The gas discharging side of a cleaning machine is equipped with a generating part 6 of fine water drops, a gas liquid separating part 7, an air flow generating part (fan) 4 and an inorganic acid removing unit 11. The inorganic acid removing unit 11 treats inorganic acid ions of F-, Cl-, PO43-, SO42-, or the like, in the cleaning water absorbing the inorganic acid gas generating from a cleaning room 1. The water treated by the inorganic acid removing unit 11 is supplied again by a pump 10 to a spraying part 6. The spraying part 6 divides the treated water into fine water drops, which are then mixed with the waste gas 5a containing the inorganic acid gas sucked by the air flow generating part (fan) 4 to adsorb the gas. The fine water drops, are captured by the gas liquid separation part 7 to produce clean air 5b, which is then sent to the injecting port 1a of the cleaning room 1 or into the room.
HIRANO MAKOTO
HIROSE TATSUMI
SHIMIZU SHIGEMI
| JPS5879597A | 1983-05-13 | |||
| JPS6397216A | 1988-04-27 | |||
| JPH07136448A | 1995-05-30 | |||
| JPH08281256A | 1996-10-29 | |||
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| JP2000176243A | 2000-06-27 |
| WO1999020374A1 | 1999-04-29 |
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