Title:
METHOD FOR TREATING SURFACE OF OBJECT, SURFACE TREATING AGENT, SURFACE TREATED ARTICLE AND PART AND APPARATUS HAVING THE SAME
Document Type and Number:
Japanese Patent JP3173027
Kind Code:
B2
Abstract:
PURPOSE: To suppress the exudation of water or grease and treat the surface of an object such as electronic equipment by forming a layer of a component having a reactive end group and a water and oil repellent atomic group at a position where both components repel on the outside of a region on a substrate surface supporting a liquid component.
CONSTITUTION: An organic compound 3 having an end group (e.g. oxirane group) chemically reactive with the surface of a substrate 1 having a region supporting a component 2 containing liquid water and/or oil and a water and oil repellent atomic group (e.g. a perfluoroxyalkyl group) is applied to the outside of the region and the organic compound 3 is made to chemically react and solidify on the substrate 1. Thereby, a layer of the compound 3 is formed at a position where the atomic group and the water or oil 2 and both of the component are capable of mutually repelling. As a result, the periphery of the surface holding water, oil or grease is modified with the water and oil repellent compound in an apparatus using the water, oil or grease which is prevented from exuding. The performance stable for a long period can be imparted to carry out the surface treatment of the object.
Inventors:
Nakagawaji Takayuki
Jun Morihara
Shoji Miyoshi
Koji Sato
Yutaka Ito
Ryuichi Kaji
Hiroshi Goh
Jun Morihara
Shoji Miyoshi
Koji Sato
Yutaka Ito
Ryuichi Kaji
Hiroshi Goh
Application Number:
JP5434291A
Publication Date:
June 04, 2001
Filing Date:
March 19, 1991
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
C08J7/04; C09K3/18; C23F11/00; H01L21/02; H01L21/304; H01L23/373; H01L23/433; F28F13/00; (IPC1-7): H01L21/02; C08J7/04; C09K3/18; C23F11/00
Domestic Patent References:
| JP288635A | ||||
| JP4958750A | ||||
| JP6175137U |
Attorney, Agent or Firm:
Yasuo Sakuta