Title:
METHOD OF TREATING SURFACE OF QUARTZ MEMBER AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3173666
Kind Code:
B2
Abstract:
PURPOSE: To stably obtain a quartz member having better gloss and higher transparency than the case treated with a burner.
CONSTITUTION: One side 4a of a quartz member 4 is irradiated with the unfocused first laser beam 10a. At the same time, in the surface 4b on opposite side, a place corresponding to a place irradiated with the first laser beam 10a is irradiated with the unfocused second laser beam 10b. Thereby better gloss and higher transparency than the case treated with a burner is obtained on the surface of the quartz member. The quartz member is free from crack.
Inventors:
Naoe Itoh
Tadao Kozeki
Makoto Yano
Yuzuru Sato
Kiyoshi Yamada
Tadao Kozeki
Makoto Yano
Yuzuru Sato
Kiyoshi Yamada
Application Number:
JP34453191A
Publication Date:
June 04, 2001
Filing Date:
December 26, 1991
Export Citation:
Assignee:
Toshiba Ceramics Co., Ltd.
International Classes:
C03B29/00; C03C23/00; C04B41/00; C04B41/80; (IPC1-7): C04B41/80; C03B29/00
Domestic Patent References:
| JP5988332A | ||||
| JP62246885A | ||||
| JP3174376A | ||||
| JP4193785A |
Attorney, Agent or Firm:
Katsufumi Izumi