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Title:
METHOD FOR TREATING WITH PLASMA AND DEVICE FOR THE SAME
Document Type and Number:
Japanese Patent JP2005336659
Kind Code:
A
Abstract:

To provide a method and device for treating with plasma, capable of performing the plasma treatment uniformly to the inside of pores of a porous substrate.

This device for treating a material to be treated 4 consisting of a porous substrate with the plasma is provided by installing a plasma-generating part 1 consisting of at least a box body 11, a gas passage 12 equipped with opposing electrodes 13 and a plasma gas-discharging port 14, a roller 3 for closely adhering the material to be treated 4 consisting of the porous substrate at the plasma-discharging port 14 of the plasma-generating part 1 and a gas-supplying part 2 for supplying the gas to the plasma gas-generating part 1.


Inventors:
IWANE KAZUYOSHI
Application Number:
JP2004157931A
Publication Date:
December 08, 2005
Filing Date:
May 27, 2004
Export Citation:
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Assignee:
SEKISUI CHEMICAL CO LTD
International Classes:
H05H1/24; C08J7/00; C08J9/36; D06B1/08; D06B19/00; D06M10/02; (IPC1-7): D06M10/02; C08J7/00; C08J9/36; D06B1/08; D06B19/00; H05H1/24