PURPOSE: To improve the measurement precision of a complicated form, by irradiating a light onto the surface of an object and by condensing the scatterred light from the surface of the object and by focusing it onto a photodiode array and by measuring the position of the surface of the object on a basis of the focusing position.
CONSTITUTION: The laser from projecting light source 1 has the output controlled by Pockels cell 2 and is condensed through focusing lens 3 onto point 2A on the surface of object 4. The scatterred light from object 4a is condensed at angle α by focusing lens 5 and is focused onto linear photodiode array 7. Control computer 15 stores the logical form of the object by the input from input terminal 16 and controls sensor 8 by table controller 18 to move sensor 8 within the logical form of the object. At this time, deviation from logical dimensions is plotted on a basis of the focusing position on photodiode array 17 by plotter 17. Thus, the object of a complicated form can be measured with a high precision.
HOCKLEY BERNARD (CA)
LIPTAY-WAGNER NICK (CA)
HAGENIERS OMER L (CA)
PASTORIUS WALTER J (CA)
