PURPOSE: To attain the vacuum degree necessary for vacuum treatment and to carry out the vacuum treatment in high efficiency, by placing a preliminary vacuum chamber to enable the introduction and delivery of the treating material in a manner to enable the connection and disconnection between said preliminary vacuum chamber and a vacuum treatment chamber and evacuating the vacuum treatment chamber to a vacuum degree higher than the level necessary for the vacuum treatment.
CONSTITUTION: The objective apparatus is provided with the vacuum treatment chamber 1, the preliminary vacuum chamber 2 capable of receiving and delivering the object to be treated, a shutter 4 to connect and disconnect the chambers, the transportation means 8, the suction means 24 connected to both chambers in common through a change-over valve, and the controlling means 28 to control the operation of the above units. The object is charged into the preliminary vacuum chamber, the vacuum treatment chamber is evacuated to a vacuum higher than the vacuum necessary for the vacuum treatment, the vacuum treatment chamber is connected to the preliminary vacuum chamber during the evacuation of the preliminary vacuum chamber and the object is transferred to the vacuum treatment chamber, the chambers are disconnected, the vacuum treatment chamber is evacuated to a vacuum degree necessary for the vacuum treatment, the chambers are connected together, the object is transferred to the preliminary vacuum chamber, the chambers are disconnected and the vacuum treatment chamber is evacuated and the preliminary vacuum chamber is evacuated after changing the object to be treated.
EBISAWA HIROO
HARA HIROBUMI
Next Patent: DUST-REMOVING APPARATUS