Title:
METHOD FOR WASHING GLASS SUBSTRATE AND APPARATUS THEREFOR
Document Type and Number:
Japanese Patent JPH05228449
Kind Code:
A
Abstract:
PURPOSE: To inexpensively supply a glass substrate with high productivity while the foreign matter firmly adhering to the surface of the glass substrate is removed by washing the glass substrate during feed.
CONSTITUTION: A glass substrate is washed by rubbing the surface of a moving glass substrate with a rotary brush having a drum 1 where synthetic fibers 2 with diameters of 0.2-3mm are planted while washing water is sprinkled over the surface of the glass substrate and repeatedly moving the rotary brush on the glass substrate along a definite locus.
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Inventors:
SUGITA HIROSHI
HASHIMOTO HISAO
HASHIMOTO HISAO
Application Number:
JP3539392A
Publication Date:
September 07, 1993
Filing Date:
February 21, 1992
Export Citation:
Assignee:
KONISHIROKU PHOTO IND
International Classes:
B08B1/04; B08B3/10; G03F1/82; H01L21/304; A46B13/02; (IPC1-7): A46B13/02; B08B1/04; B08B3/10; G03F1/08; H01L21/304
Attorney, Agent or Firm:
Naoki Fukumura