To prevent the repeatability of coating treatment from being degraded due to washing treatment while preventing failure caused by the stuck coating liquid by quickly recovering the lowered temperature in a scattering preventive cup by temperature controlling gas.

This apparatus is provided with a flow control valve 5 for adjusting exhaust pressure in a scattering preventive cup 3, a first air nozzle 21 for jetting temperature controlling gas to the inner surface of the cup 3 and a second air nozzle 22 for feeding the temperature controlling gas from above. When feeding a washing liquid, the flow control valve 5 is adjusted and a downflow is taken in and also the temperature controlling gas is fed from the second air nozzle 22, thereby introducing the temperature controlling as more than that on coating. After that, the temperature controlling gas is jetting to the inner surface of the cup 3 from the first air nozzle 21 to promote the volatilization. In this way, the atmospheric temperature can quickly be recovered.