Title:
METHOD FOR WASHING ULTRA-PURE WATER PRODUCING APPARATUS
Document Type and Number:
Japanese Patent JP3231170
Kind Code:
B
Abstract:
PURPOSE: To easily and efficiently wash the entire part in a circulation system for returning remaining ultra-pure water again to a pure water storage tank and to assure a sterilization effect as well by washing this circulation system with an alcohol represented by an isopropyl alcohol or an aq. soln. thereof.
CONSTITUTION: Raw water is treated with the pure water by a pretreating device 1 and is stored in an ultra-pure water storage tank 2. The stored pure water is sent to a heat exchanger 4 where the water temp. is controlled; thereafter, the water is sent to a UV oxidation device 5 where org. matter is decomposed. Further, ionic impurities are removed from the pure water in a cartridge polisher 6 and thereafter, particulates, etc., are removed by a membrane treating device 7, by which the ultra-pure water is formed. The ultra-pure water is sent to a place 8 of use and is supplied to various kinds of applications. On the other hand, the remaining ultra-pure water is returned from a return piping 9 to the pure water storage tank 2 and is circulated. In such a case, the circulation system of the ultra-pure water is washed with the alcohol represented by the isopropyl alcohol or the aq. soln. thereof.
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Inventors:
Tanabe, Madoka
Application Number:
JP1994000000238
Publication Date:
September 14, 2001
Filing Date:
January 06, 1994
Export Citation:
Assignee:
JAPAN ORGANO CO LTD
International Classes:
B08B3/10; C02F1/42; C02F1/44; B08B3/10; C02F1/42; C02F1/44; (IPC1-7): C02F1/42; B08B3/10; C02F1/44