Title:
METHOD FOR WORKING PLATE-LIKE OBJECT
Document Type and Number:
Japanese Patent JP2020179474
Kind Code:
A
Abstract:
To provide a method for working a plate-like object that forms a plate-like object into a circular shape which can prevent uneven wear and damage of a cutting blade.SOLUTION: A method for working a plate-like object includes at least a polygonal plate-like object formation step of cutting a plate-like object with a cutting blade 16 and forming a polygonal plate-like object 2' that inscribes a circle C to be formed, and a circular plate-like object formation step of cutting the polygonal plate-like object 2' along the circumference of the circle C with the cutting blade 16 while rotating the polygonal plate-like object 2', and forming a circular plate-like object.SELECTED DRAWING: Figure 5
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Inventors:
OMAE MAKIKO
Application Number:
JP2019085150A
Publication Date:
November 05, 2020
Filing Date:
April 26, 2019
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B5/04; B24B27/06; H01L21/304
Domestic Patent References:
| JP2001319967A | 2001-11-16 | |||
| JPH1154461A | 1999-02-26 | |||
| JP2014112671A | 2014-06-19 | |||
| JP2006199528A | 2006-08-03 |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Kojino Koji
Yoshifumi Kaneko
Sachiko Okunuki
Kojino Koji
Yoshifumi Kaneko