Title:
ナノ粒子を有する層を基板上に製造するための方法と装置
Document Type and Number:
Japanese Patent JP2009500522
Kind Code:
A
Abstract:
The invention relates to a method for producing a layer (110) having nanoparticles (40), on a substrate (100). The invention is based on the object of specifying a method for producing a layer containing nanoparticles, which method can be carried out particularly easily and nevertheless offers a very wide degree of freedom for the configuration and the composition of the layer to be produced. According to the invention, this object is achieved in that nanoparticles (40) are released and a nanoparticle stream (50) is produced in a first process chamber (10), the nanoparticle stream (50) is passed into a second process chamber (80), and the nanoparticles (40) are deposited on the substrate (100) in the second process chamber (80).
Inventors:
Yabad, Rene
Kruger, Urzus
Celtic ferreteu, daniel
Rüten, Volkmal
Raiche, Ralf
Lindtler, Michael
Kruger, Urzus
Celtic ferreteu, daniel
Rüten, Volkmal
Raiche, Ralf
Lindtler, Michael
Application Number:
JP2008519922A
Publication Date:
January 08, 2009
Filing Date:
July 03, 2006
Export Citation:
Assignee:
Siemens Aktiengesellschaft
International Classes:
C23C24/04; B82B3/00; C30B29/66
Attorney, Agent or Firm:
Iwao Yamaguchi