Title:
プローブの角度を決定する方法、高周波特性検査装置、プログラム及び記憶媒体
Document Type and Number:
Japanese Patent JP6858380
Kind Code:
B2
Abstract:
A method that includes changing a probe angle with respect to the conductor surface of a substrate that has a flat conductor surface mounted on the mounting surface of a stage in a high-frequency test system, thereby changing the state of contact of the tip of a signal terminal and tip of a ground terminal with the conductor surface, outputting high-frequency signals from the signal terminal to the conductor surface and receiving reflected signals using the probe to find S-parameters at different probe angles, and determining, based on a plurality of the S-parameters, a reference probe angle at which the reference line formed connecting the tip of the signal terminal and tip of the ground terminal is parallel with the conductor surface.
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Inventors:
Ryo Sakamaki
Masahiro Horibe
Masahiro Horibe
Application Number:
JP2019541027A
Publication Date:
April 14, 2021
Filing Date:
September 07, 2018
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
G01R27/06; G01R27/02; G01R27/28
Domestic Patent References:
| JP2000232143A | ||||
| JP10116863A | ||||
| JP351777A | ||||
| JP2011196813A | ||||
| JP6562489B2 | ||||
| JP6765104B2 | ||||
| JP201939869A |
Foreign References:
| US8933707 | ||||
| US20130015870 |
Other References:
SAKAMAKI, Ryo, HORIBE, Masahiro,“Proposal of a Precision Probe-Tilt Adjustment with the RF Signal Detection Technique”,2018 Conference on Precision Electromagnetic Measurements (CPEM 2018),2018年 7月11日,DOI: 10.1109/CPEM.2018.8500884
Attorney, Agent or Firm:
Atsushi Aoki
Shinji Mitsuhashi
Masaru Nakajima
Yoichi Watanabe
Nobuo Sekine
Tetsuo Miyamoto
Shinji Mitsuhashi
Masaru Nakajima
Yoichi Watanabe
Nobuo Sekine
Tetsuo Miyamoto