Title:
2つの可動部材が相互関係において適正に位置決めされていることを検出するための方法及び装置
Document Type and Number:
Japanese Patent JP4290313
Kind Code:
B2
Inventors:
Robert Mitchell
James biddle
Ian Earl. Joyce
James Victor Edwards
James biddle
Ian Earl. Joyce
James Victor Edwards
Application Number:
JP2000118370A
Publication Date:
July 01, 2009
Filing Date:
April 19, 2000
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
B25J9/10; G01B11/00; B25J13/08; G01B9/08; G01B11/27; H01J37/317; H01L21/265; H01L21/677; H01L21/683; H01L21/687; H01L21/00
Domestic Patent References:
| JP3123804A | ||||
| JP2119117A | ||||
| JP4165615A | ||||
| JP4046547U | ||||
| JP11023217A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Toshiaki Matsuzawa
Yuichi Yamada
Okimoto Kazuaki
Toshiaki Matsuzawa
Yuichi Yamada
Okimoto Kazuaki